Comprehensive Methodology for Multiple Spots Competing Progressive Breakdown for BEOL/FEOL Applications
Комплексная методика для конкурирующего прогрессирующего пробоя в нескольких точках для приложений BEOL/FEOL
2019-03-01
SCID: 54.1/569pnd5k
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BEOL FEOL applicationsMonte-Carlo simulationdielectric breakdownhard breakdown distributionsmultiple-spot competing progressive breakdownnon-Weibull behaviorprogressive breakdown time (TPBD)thickness variability
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Abstract (AI)
We present the general framework of dielectric breakdown (BD) showing multiple spot competing progressive breakdown (PBD) in BEOL/FEOL applications in the presence of thickness variability. A Monte-Carlo simulation procedure is used to investigate post-BD phenomena from small thickness variation in FEOL SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> to very large variations in BEOL low-K dielectrics. Rather than directly modelling current transients as done recently [1], we apply successive BD statistics methodology to generate multiple BD spots and their associated progressive breakdown time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">PBD</sub> ). We show that for single-spot PBD mode the first BD time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">BD</sub> or T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">BD1</sub> ) is intrinsically uncorrelated to its residual time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">RES</sub> ) even if the variability is present. In contrast, in the case of multiple-spot competing PBD, the final hard breakdown (HBD) distributions are fundamentally affected by thickness variation so that they become non-Weibull and deviate from Poisson area scaling at high percentiles. We report an important intrinsic correlation between T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">BD</sub> and T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">RES</sub> results involving multiple spot PBD if thickness variability is present. Our MC simulation results are in excellent agreement with experimental data for three sets of hardware from FEOL and BEOL applications.
Key Findings
1
A general framework models multiple-spot competing progressive dielectric breakdown (PBD) in BEOL/FEOL with thickness variability.
2
An intrinsic correlation between TBD and TRES appears in multiple-spot PBD when thickness variability is present.
3
For multiple-spot competing PBD, final hard breakdown (HBD) distributions are strongly affected by thickness variation, becoming non-Weibull and deviating from Poisson area scaling at high percentiles.
4
For single-spot PBD, the first BD time (TBD or TBD1) is intrinsically uncorrelated with the residual time (TRES), even with thickness variability.
5
Monte Carlo simulation of successive breakdown statistics generates multiple BD spots and associated progressive breakdown times (TPBD) instead of directly modeling current transients.
6
Monte Carlo simulation results agree well with experimental data from three hardware sets across FEOL and BEOL applications.
Research Object
Dielectric layers in BEOL and FEOL semiconductor applications exhibiting multiple-spot competing progressive breakdown (PBD)
Research Subject
Effects of thickness variability on multiple-spot competing progressive breakdown dynamics and statistics, including correlations between first BD time (T_BD) and residual time (T_RES), emergence of non-Weibull final hard-breakdown distributions, and deviation from Poisson area scaling
Publication Details
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2019-03-01
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