Improved quantitative description of Auger recombination in crystalline silicon
Улучшенное количественное описание аугероновской рекомбинации в кристаллическом кремнии
2012-10-09
SCID: 54.1/5b2cc27c
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Auger recombinationCoulomb-enhanced Augeraluminum oxide passivationcarrier injection levelcrystalline silicondopant densityhigh-purity n-type and p-type siliconintrinsic recombination parametrizationradiative recombinationsilicon nitride passivation
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Abstract (AI)
An accurate quantitative description of the Auger recombination rate in silicon as a function of the dopant density and the carrier injection level is important to understand the physics of this fundamental mechanism and to predict the physical limits to the performance of silicon based devices. Technological progress has permitted a near suppression of competing recombination mechanisms, both in the bulk of the silicon crystal and at the surfaces. This, coupled with advanced characterization techniques, has led to an improved determination of the Auger recombination rate, which is lower than previously thought. In this contribution we present a systematic study of the injection-dependent carrier recombination for a broad range of dopant concentrations of high-purity $n$-type and $p$-type silicon wafers passivated with state-of-the-art dielectric layers of aluminum oxide or silicon nitride. Based on these measurements, we develop a general parametrization for intrinsic recombination in crystalline silicon at 300 K consistent with the theory of Coulomb-enhanced Auger and radiative recombination. Based on this improved description we are able to analyze physical aspects of the Auger recombination mechanism such as the Coulomb enhancement.
Key Findings
1
Determined that recent measurements show the Auger recombination rate in silicon is lower than previously thought.
2
Developed a general parametrization for intrinsic recombination in crystalline silicon at 300 K consistent with Coulomb-enhanced Auger and radiative recombination theory.
3
Measured injection-dependent Auger recombination rates in high-purity n- and p-type silicon across broad dopant concentrations, with state-of-the-art Al2O3 or SiNx surface passivation.
4
Used the improved description to analyze physical aspects of Auger recombination, including quantification of Coulomb enhancement effects.
Research Object
Auger recombination in high-purity crystalline silicon wafers (n-type and p-type) with dielectric surface passivation
Research Subject
Quantitative, injection- and dopant-density-dependent description and parametrization of the Auger recombination rate at 300 K, including Coulomb-enhancement effects and consistency with radiative recombination theory
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2012-10-09
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