Single-step manufacturing of hierarchical dielectric metalens in the visible

Одностадийное изготовление иерархической диэлектрической металинзы в видимом диапазоне
Gwanho Yoon, Kwan Kim, Daihong Huh, Heon Lee, Junsuk Rho
2020-05-08

UV nanoimprint lithographydielectric metalenshierarchical matrix-inclusion compositetitanium dioxide nanoparticlesvisible spectrum
Metalenses have shown a number of promising functionalities that are comparable with conventional refractive lenses. However, current metalenses are still far from commercialization due to the formidable fabrication costs. Here, we demonstrate a low-cost dielectric metalens that works in the visible spectrum. The material of the metalens consists of a matrix-inclusion composite in which a hierarchy satisfies two requirements for the single-step fabrication; a high refractive index and a pattern-transfer capability. We use a UV-curable resin as a matrix to enable direct pattern replication by the composite, and titanium dioxide nanoparticles as inclusions to increase the refractive index of the composite. Therefore, such a dielectric metalens can be fabricated with a single step of UV nanoimprint lithography. An experimental demonstration of the nanoparticle composite-based metalens validates the feasibility of our approach and capability for future applications. Our method allows rapid replication of metalenses repeatedly and thereby provides an advance toward the use of metalenses on a commercial scale.
1
A low-cost dielectric metalens operating in the visible spectrum was demonstrated to address the high fabrication costs limiting commercialization.
2
Experimental results validate the feasibility of the nanoparticle-composite metalens and its potential for commercial-scale applications.
3
The metalens can be fabricated in a single UV nanoimprint lithography step, enabling rapid and repeated replication.
4
The metalens uses a hierarchical matrix-inclusion composite combining high refractive index with pattern-transfer capability for single-step fabrication.
5
UV-curable resin enables direct pattern replication, while titanium dioxide nanoparticles increase the composite’s refractive index.

A hierarchical dielectric metalens made from a UV-curable resin–titanium dioxide nanoparticle matrix-inclusion composite for visible-spectrum operation

The feasibility of single-step UV nanoimprint fabrication, including refractive-index enhancement, pattern-transfer capability, and repeatable low-cost replication

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2020-05-08
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Authors
Gwanho Yoon
Kwan Kim
Daihong Huh
Heon Lee
Junsuk Rho
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