Single-crystal, 4-inch and ultrathin gallium oxide for sundial-inspired high-dimensional solar-blind photodetection metasystem
Монокристаллический, 4‑дюймовый и ультратонкий оксид галлия для солнечно‑слепой фотодетекционной метасистемы, вдохновлённой солнечными часами
2026-06-29
SCID: 54.1/9bagjw5u
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4-inch ultrathin waferliquid-metal-assisted synthesissolar-blind photodetectorsundial-inspired metasystemβ-Ga2O3
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Abstract (AI)
Ultra-wide bandgap gallium oxides offer tremendous possibilities to develop short-wave optoelectronic devices. However, it is formidably challenging to produce single-crystal gallium oxide wafer and develop high-performance high-dimensional optoelectronics. Here we show a liquid-metal-assisted strategy to directly synthesize and transfer single-crystal, large-area and ultrathin β-Ga2O3. Benefiting from the UV-exposure oxidation of liquid gallium and strong interaction with gallium, our β-Ga2O3 film shows a 4-inch wafer-scale size, a 7.5-nm thickness and a flexible transfer operation. The solar-blind β-Ga2O3 detector achieves high responsivity (16.3 A W−1), fast response (<150 μs) and wide linear dynamic range (120 dB). By employing metasurface design, the anisotropy ratio reaches a record high value of 28.8 for Ga2O3-based detectors. Moreover, we develop a sundial-inspired metasystem to simultaneously detect the incident direction, polarization, and intensity of solar-blind irradiation. These findings illustrate the potential of high-quality Ga2O3 wafer for high-dimensional photodetection, paving the way for next-generation solar-blind communications. Researchers show a liquid-metal-assisted strategy to synthesize and transfer 4-inch ultrathin β-Ga2O3 single crystal. The sundial-inspired metasystem can simultaneously detect the direction, polarization and intensity of solar-blind irradiation.
Key Findings
1
Demonstrated a sundial-inspired metasystem that simultaneously detects incident direction, polarization, and intensity of solar-blind irradiation.
2
Detector achieves fast response time under 150 μs and a wide linear dynamic range of 120 dB.
3
Developed a liquid-metal-assisted strategy to directly synthesize and transfer single-crystal, large-area, ultrathin β-Ga2O3 films.
4
Metasurface design yields an anisotropy ratio of 28.8, a record high for Ga2O3-based detectors.
5
Produced β-Ga2O3 films at 4-inch wafer scale with 7.5-nm thickness and flexible transfer capability.
6
Solar-blind β-Ga2O3 detector exhibits high responsivity of 16.3 A W−1.
Research Object
Single-crystal, 4-inch, ultrathin β-Ga2O3 wafer/film synthesized and transferred via liquid-metal-assisted method
Research Subject
High-dimensional solar-blind photodetection performance and capabilities of the β-Ga2O3 (responsivity, response time, linear dynamic range, anisotropy) and its integration into a sundial-inspired metasystem for direction, polarization, and intensity detection
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2026-06-29
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