Single-crystal, 4-inch and ultrathin gallium oxide for sundial-inspired high-dimensional solar-blind photodetection metasystem

Монокристаллический, 4‑дюймовый и ультратонкий оксид галлия для солнечно‑слепой фотодетекционной метасистемы, вдохновлённой солнечными часами
Yichun Liu, Cheng‐Wei Qiu, Haiyang Xu, Weiheng Zhong, Jiajuan Shi, Weizhen Liu, Jiawei Jing, Xingsi Liu, Jintao Fu, Xinyun Zhu
2026-06-29

4-inch ultrathin waferliquid-metal-assisted synthesissolar-blind photodetectorsundial-inspired metasystemβ-Ga2O3
Ultra-wide bandgap gallium oxides offer tremendous possibilities to develop short-wave optoelectronic devices. However, it is formidably challenging to produce single-crystal gallium oxide wafer and develop high-performance high-dimensional optoelectronics. Here we show a liquid-metal-assisted strategy to directly synthesize and transfer single-crystal, large-area and ultrathin β-Ga2O3. Benefiting from the UV-exposure oxidation of liquid gallium and strong interaction with gallium, our β-Ga2O3 film shows a 4-inch wafer-scale size, a 7.5-nm thickness and a flexible transfer operation. The solar-blind β-Ga2O3 detector achieves high responsivity (16.3 A W−1), fast response (<150 μs) and wide linear dynamic range (120 dB). By employing metasurface design, the anisotropy ratio reaches a record high value of 28.8 for Ga2O3-based detectors. Moreover, we develop a sundial-inspired metasystem to simultaneously detect the incident direction, polarization, and intensity of solar-blind irradiation. These findings illustrate the potential of high-quality Ga2O3 wafer for high-dimensional photodetection, paving the way for next-generation solar-blind communications. Researchers show a liquid-metal-assisted strategy to synthesize and transfer 4-inch ultrathin β-Ga2O3 single crystal. The sundial-inspired metasystem can simultaneously detect the direction, polarization and intensity of solar-blind irradiation.
1
Demonstrated a sundial-inspired metasystem that simultaneously detects incident direction, polarization, and intensity of solar-blind irradiation.
2
Detector achieves fast response time under 150 μs and a wide linear dynamic range of 120 dB.
3
Developed a liquid-metal-assisted strategy to directly synthesize and transfer single-crystal, large-area, ultrathin β-Ga2O3 films.
4
Metasurface design yields an anisotropy ratio of 28.8, a record high for Ga2O3-based detectors.
5
Produced β-Ga2O3 films at 4-inch wafer scale with 7.5-nm thickness and flexible transfer capability.
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Solar-blind β-Ga2O3 detector exhibits high responsivity of 16.3 A W−1.

Single-crystal, 4-inch, ultrathin β-Ga2O3 wafer/film synthesized and transferred via liquid-metal-assisted method

High-dimensional solar-blind photodetection performance and capabilities of the β-Ga2O3 (responsivity, response time, linear dynamic range, anisotropy) and its integration into a sundial-inspired metasystem for direction, polarization, and intensity detection

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2026-06-29
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Yichun Liu
Cheng‐Wei Qiu
Haiyang Xu
Weiheng Zhong
Jiajuan Shi
Weizhen Liu
Jiawei Jing
Xingsi Liu
Jintao Fu
Xinyun Zhu
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