Preparation of a Gradient SiO2 Antireflective Coating by a Co-Sputtering Method Using a Dual Rotatable
Получение градиентного противоотражающего покрытия SiO2 методом ко-распыления с использованием двухвращающегося устройства
2016-01-01
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Gradient SiO2 antireflective coatingco-sputteringdual rotatable
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Abstract (AI)
5 S.
Key Findings
1
A gradient SiO2 antireflective coating was prepared using a co-sputtering method with a dual rotatable setup.
2
The fabrication approach enables creation of a gradient refractive-index SiO2 layer via co-sputtering and rotation control.
Research Object
Gradient SiO2 antireflective coating prepared by a co-sputtering method using a dual rotatable (substrate or target) system
Research Subject
Preparation methodology and resulting antireflective optical properties of the gradient SiO2 coating produced by co-sputtering with a dual rotatable setup
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2016-01-01
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