A broadband achromatic metalens array for integral imaging in the visible

Широкополосная ахроматическая метаповерхностная линзовая решётка для интегральной визуализации в видимом диапазоне
Lidan Zhou, Lin Liu, Jian‐Wen Dong, Hui Ren, Hao-Yang Qiu, Zhi-Bin Fan, Han-Le Zhang, Xiao-Ning Pang, Qiong‐Hua Wang
2019-07-23

achromatic refractive indexbroadband achromatic metalens arrayintegral imagingon-chip CMOS integrationsilicon nitride metalenses
Integral imaging is a promising three-dimensional (3D) imaging technique that captures and reconstructs light field information. Microlens arrays are usually used for the reconstruction process to display 3D scenes to the viewer. However, the inherent chromatic aberration of the microlens array reduces the viewing quality, and thus, broadband achromatic imaging remains a challenge for integral imaging. Here, we realize a silicon nitride metalens array in the visible region that can be used to reconstruct 3D optical scenes in the achromatic integral imaging for white light. The metalens array contains 60 × 60 polarization-insensitive metalenses with nearly diffraction-limited focusing. The nanoposts in each high-efficiency (measured as 47% on average) metalens are delicately designed with zero effective material dispersion and an effective achromatic refractive index distribution from 430 to 780 nm. In addition, such an achromatic metalens array is composed of only a single silicon nitride layer with an ultrathin thickness of 400 nm, making the array suitable for on-chip hybrid-CMOS integration and the parallel manipulation of optoelectronic information. We expect these findings to provide possibilities for full-color and aberration-free integral imaging, and we envision that the proposed approach may be potentially applicable in the fields of high-power microlithography, high-precision wavefront sensors, virtual/augmented reality and 3D imaging.
1
A silicon nitride metalens array enables broadband achromatic integral imaging and reconstruction of three-dimensional optical scenes under white light.
2
Delicately designed nanoposts provide zero effective material dispersion and an achromatic refractive-index distribution from 430 to 780 nm.
3
The array consists of a single 400-nm-thick silicon nitride layer, supporting potential on-chip hybrid-CMOS integration and parallel optoelectronic information processing.
4
The array contains 60 × 60 polarization-insensitive metalenses with nearly diffraction-limited focusing across the visible spectrum.
5
The metalenses achieve an average measured efficiency of 47%.

a silicon nitride metalens array for visible-light integral imaging

broadband achromatic focusing and 3D-scene reconstruction with reduced chromatic aberration across 430–780 nm

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2019-07-23
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Lidan Zhou
Lin Liu
Jian‐Wen Dong
Hui Ren
Hao-Yang Qiu
Zhi-Bin Fan
Han-Le Zhang
Xiao-Ning Pang
Qiong‐Hua Wang
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