Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

Датчики на поверхностных акустических волнах (ПАВ): физика, материалы и применения
Debdyuti Mandal, Sourav Banerjee
2022-01-21

guided elastodynamic wavesinterdigitated electrode transducersmicrofluidicspiezoelectric crystalssurface acoustic wave sensors
Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials used for designing SAW sensors. Then, how the piezoelectric materials and cuts could alter the functionality of the sensors is explained. The article summarizes a few key configurations of the electrodes and respective guidelines for generating different guided wave patterns such that new applications can be foreseen. Finally, the article explores the applications of SAW sensors and their progress in the fields of biomedical, microfluidics, chemical, and mechano-biological applications along with their crucial roles and potential plans for improvements in the long-term future in the field of science and technology.
1
Periodic IDT meta-designs determine SAW sensor functionality by controlling the generated guided-wave patterns.
2
Piezoelectric material selection and crystal orientation cuts can substantially alter SAW sensor functionality and performance.
3
SAW sensors are advancing biomedical, microfluidic, chemical, and mechano-biological applications, with continuing opportunities for long-term technological improvement.
4
SAW sensors use piezoelectric crystals and interdigitated electrode transducers to generate and detect guided surface acoustic waves through electromechanical coupling.
5
The review summarizes electrode configurations and design guidelines for generating wave patterns aimed at enabling new sensor applications.

Surface acoustic wave (SAW) sensors based on piezoelectric crystals with interdigitated electrode transducers

The physics, material and crystal-cut dependence, electrode configurations, guided-wave patterns, functionality, and applications of SAW sensors

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2022-01-21
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Debdyuti Mandal
Sourav Banerjee
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