Role of amino acid-based inhibitors in the dynamic electrochemical behavior of Cu and Co during chemical mechanical planarization

Jihoon Seo, Elizabeth J. Podlaha, Thi Thuy Hoang Tran, Mansour Moinpour, Ashwani K. Rawat
2025-04-20
SCID:  54.1/z63h7zaf
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2025-04-20
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Jihoon Seo
Elizabeth J. Podlaha
Thi Thuy Hoang Tran
Mansour Moinpour
Ashwani K. Rawat
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