“Zero change” platform for monolithic back-end-of-line integration of phase change materials in silicon photonics

Zequn Chen, Hui Ma, Chunlei Sun, Maoliang Wei, Bo Tang, Junying Li, Lan Li, Hongtao Lin, Ruonan Liu, Kai Xu, Yiting Yun, Yingchun Wu, Kangjian Bao, Kunhao Lei, Ming Li, Peng Zhang
2023-10-20
SCID:  54.1/zpd6ybjk
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2023-10-20
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Authors
Zequn Chen
Hui Ma
Chunlei Sun
Maoliang Wei
Bo Tang
Junying Li
Lan Li
Hongtao Lin
Ruonan Liu
Kai Xu
Yiting Yun
Yingchun Wu
Kangjian Bao
Kunhao Lei
Ming Li
Peng Zhang
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