Micro-Transfer Printing for Heterogeneous Si Photonic Integrated Circuits

Bart Kuyken, Dries Van Thourhout, Roel Baets, Günther Roelkens, Geert Morthier, Joris Van Campenhout, Guy Lepage, Dongbo Wang, Sarah Uvin, Tom Vanackere, Maximilien Billet, Camiel Op de Beeck, Stijn Cuyvers, Bahawal Haq, Tom Vandekerckhove, Laurens Bogaert, Jasper De Witte, He Li, Jing Zhang, Biwei Pan, Clemens J. Krückel, Emadreza Soltanian, Dennis Maes, Isaac Luntadila Lufungula, Xin Guo, Senbiao Qin, Grigorij Muliuk, Jeroen Goyvaerts, Peter Verheyen
2022-11-16

SCID:  54.1/zpj54yba
Silicon photonics (SiPh) is a disruptive technology in the field of integrated photonics and has experienced rapid development over the past two decades. Various high-performance Si and Ge/Si-based components have been developed on this platform that allow for complex photonic integrated circuits (PICs) with small footprint. These PICs have found use in a wide range of applications. Nevertheless, some non-native functions are still desired, despite the versatility of Si, to improve the overall performance of Si PICs and at the same time cut the cost of the eventual Si photonic system-on-chip. Heterogeneous integration is verified as an effective solution to address this issue, e.g. through die-wafer-bonding and flip-chip. In this paper, we discuss another technology, micro-transfer printing, for the integration of non-native material films/opto-electronic components on SiPh-based platforms. This technology allows for efficient use of non-native materials and enables the (co-)integration of a wide range of materials/devices on wafer scale in a massively parallel way. In this paper we review some of the recent developments in the integration of non-native optical functions on Si photonic platforms using micro-transfer printing.
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2022-11-16
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Bart Kuyken
Dries Van Thourhout
Roel Baets
Günther Roelkens
Geert Morthier
Joris Van Campenhout
Guy Lepage
Dongbo Wang
Sarah Uvin
Tom Vanackere
Maximilien Billet
Camiel Op de Beeck
Stijn Cuyvers
Bahawal Haq
Tom Vandekerckhove
Laurens Bogaert
Jasper De Witte
He Li
Jing Zhang
Biwei Pan
Clemens J. Krückel
Emadreza Soltanian
Dennis Maes
Isaac Luntadila Lufungula
Xin Guo
Senbiao Qin
Grigorij Muliuk
Jeroen Goyvaerts
Peter Verheyen
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