Step-controlled epitaxial growth of SiC: High quality homoepitaxy

Tsunenobu Kimoto, Hiroyuki Matsunami
1997-08-01
SCID:  54.1/7daf24pg
Publication Details
Publication Date
1997-08-01
Journal
Publisher
ISSN
Access Type
Author Information
Authors
Tsunenobu Kimoto
Hiroyuki Matsunami
Explore More Research
Use the citation graph to discover related papers and expand your research horizons.
Click any node to explore →
Download PDF
100%